| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for inspecting the defect of a filter, which can improve a detection accuracy of the defect, while using liquid particles. <P>SOLUTION: A method of inspecting the defect of a filter includes the steps of : generating a gas flow containing a liquid particle group; eliminating the particles relatively large in diameter among the liquid particle group; supplying the gas flow containing the liquid particle group whose large particles are eliminated to one end surface of the filter; and detecting a concentration distribution of the liquid particles in the gas discharged from the other end surface of the filter. <P>COPYRIGHT: (C)2013,JPO&INPIT |
