发明名称 TRANSISTOR OF SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
摘要 Provided are a transistor of a semiconductor device and a method for manufacturing the same. A gate induced drain leakage (GIDL) current is reduced by decreasing a work function at an upper portion of a gate electrode, and a threshold voltage of the transistor is maintained by maintaining a work function at a lower portion of the gate electrode at a high level, thereby reducing a leakage current of the transistor and reducing a read time and a write time of the semiconductor device. The transistor of the semiconductor device includes: a recess with a predetermined depth in a semiconductor substrate; a first gate electrode disposed within the recess; and a second gate electrode disposed on the first gate electrode into which ions of one or more of nitrogen (N), oxygen (O), arsenic (As), aluminum (Al), and hydrogen (H) are doped.
申请公布号 KR101194973(B1) 申请公布日期 2012.10.25
申请号 KR20100039014 申请日期 2010.04.27
申请人 发明人
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
代理机构 代理人
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