| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive film which is formed by a coating method as a low-cost and simple manufacturing method of transparent conductive film, has high conductivity and is endowed with excellent film strength and superior transparency, and to provide the manufacturing method of this transparent conductive film. <P>SOLUTION: An oxidation firing process is a process in which, in an oxygen-containing atmosphere, the temperature of a dried coating film is raised up to not lower than the calcination temperature at which at least the crystallization of inorganic components occurs, organic components are removed by thermal decomposition or combustion, or the thermal decomposition and combustion, and a conductive oxide particulate film is formed by being densely filled with conductive oxide particulates each containing a dopant metal compound and having an indium oxide as a main component. In a reduction firing process, the conductive oxide particulate film formed in the oxidation firing process contains at least hydrogen of 0.1 percent by volume or more and steam, and the firing is performed at a temperature of 300°C or more in a reducing atmosphere in which the dew point temperature is -55 to 30°C. <P>COPYRIGHT: (C)2013,JPO&INPIT |
