METHOD AND DEVICE FOR APPLYING APPLICATION LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a method and device for applying an application liquid that can precisely control an application amount of an application liquid.

SOLUTION: The method for applying an application liquid includes: a first relational expression preparing step of figuring out a first relational expression expressing a flow amount indicated by a reference flow meter disposed on a main tube when an application liquid is supplied through the main tube to one branch tube among a plurality of branch tubes, and a flow rate indicated by a branch tube flow meter disposed on the branch tube; a second relational expression preparing step of figuring out a first relational expression expressing a flow rate set value of a flow rate control valve disposed on a branch tube when an application liquid is supplied through the main tube to one branch tube among a plurality of branch tubes, and a flow rate indicated by a branch tube flow meter disposed on the branch tube; a branch tube changing step of executing the first relational expression preparing step and the second relational expression preparing step sequentially for other branch tubes among the plurality of branch tubes; and an applying step of supplying the application liquid to the substrate by regulating each flow control valve of each branch tube based on the first relational expression and the second relational expression prepared for each of the branch tubes.

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