| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for obtaining a glass substrate for a magnetic recording medium that has a smooth principal plane by polishing a principal plane of the glass substrate at a high polishing speed without using cerium oxide abrasive particles and by removing flaws, cracks or the like that have occurred during processing of the glass substrate. <P>SOLUTION: A manufacturing method of a glass substrate for a magnetic recording medium comprises: a shape imparting step; a principal plane grinding step; and a principal plane polishing step. Further, the principal plane grinding step has a fixed abrasive particles grinding step of grinding a principal plane of the glass substrate by using a fixed abrasive particles tool that has diamond abrasive particles with a mean particle diameter of 0.01 μm to 15 μm. Furthermore, the principal plane polishing step includes:a first polishing step of polishing the principal plane thereof by using polishing liquid that includes abrasive particles with a mean particle diameter of 5 nm to 3000 nm other than cerium oxide particles such as silica particles and zirconia particles and a polishing pad; and a second polishing step of subsequently polishing the principal plane thereof by using polishing liquid that includes silica abrasive particles with a mean particle diameter of 5 to 50 nm and the polishing pad. <P>COPYRIGHT: (C)2013,JPO&INPIT |
