发明名称 |
Radiation Detector, Method of Manufacturing a Radiation Detector, and Lithographic Apparatus Comprising a Radiation Detector |
摘要 |
In one an embodiment, there is provided an assembly comprising at least one detector. Each of the at least one detector includes a substrate having a doped region of a first conduction type, a layer of dopant material of a second conduction type located on the substrate, a diffusion layer formed within the substrate and in contact with the layer of dopant material and the doped region of the substrate, wherein a doping profile, which is representative of a doping material concentration of the diffusion layer, increases from the doped region of the substrate to the layer of dopant material, a first electrode connected to the layer of dopant material, and a second electrode connected to the substrate. The diffusion layer is arranged to form a radiation sensitive surface. |
申请公布号 |
US2012268722(A1) |
申请公布日期 |
2012.10.25 |
申请号 |
US201213399560 |
申请日期 |
2012.02.17 |
申请人 |
NIHTIANOV STOYAN;VAN DER SIJS ARIE JOHAN;MOEST BEARRACH;KEMPER PETRUS WILHELMUS JOSEPHUS MARIA;HAAST MARC ANTONIUS MARIA;BAAS GERARDUS WILHELMUS PETRUS;NANVER LIS KAREN;SARUBBI FRANCESCO;SCHUWER ANTONIUS ANDREAS JOHANNES;GOMMEREN GREGORY MICHA;POT MARTIJN;SHOLTES THOMAS LUDOVICUS MARIA;ASML NETHERLANDS B.V. |
发明人 |
NIHTIANOV STOYAN;VAN DER SIJS ARIE JOHAN;MOEST BEARRACH;KEMPER PETRUS WILHELMUS JOSEPHUS MARIA;HAAST MARC ANTONIUS MARIA;BAAS GERARDUS WILHELMUS PETRUS;NANVER LIS KAREN;SARUBBI FRANCESCO;SCHUWER ANTONIUS ANDREAS JOHANNES;GOMMEREN GREGORY MICHA;POT MARTIJN;SHOLTES THOMAS LUDOVICUS MARIA |
分类号 |
G03B27/54;H01L21/66;H01L31/0224;H01L31/18 |
主分类号 |
G03B27/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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