COMPOSITIONS AND METHODS FOR CMP OF LOW-K DIELECTRIC MATERIALS,申请号KR20097009510-传众专利搜索

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发明名称	COMPOSITIONS AND METHODS FOR CMP OF LOW-K DIELECTRIC MATERIALS
摘要
申请公布号	KR101194901(B1)	申请公布日期	2012.10.25
申请号	KR20097009510	申请日期	2007.11.07
申请人		发明人
分类号	C09K3/14	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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