Positioning stage of atomic force microscope, has force applicators that includes plungers having identical magnetic structure that are arranged for applying opposing forces to worktop

摘要

The positioning stage has a drive unit (8) that is provided for moving a worktop (2). The force applicators are arranged for applying forces to the worktop, where the forces applied by the force applicators are opposite to each other. The force applicators are provided with plungers (10,16) having identical magnetic structure (12). A position sensor (6) is provided for determining position of the worktop which is moved to target position by the applied forces. An independent claim is included for method for moving worktop of positioning stage.