| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify a configuration of a high frequency power supply apparatus in which a DC voltage is converted to a high frequency AC voltage by an inverter circuit, and the high frequency AC voltage is supplied to a load. <P>SOLUTION: A high frequency power supply apparatus includes an inverter circuit 3 for converting a DC power generated by a DC power supply section 20 to an AC power, and a transformer 4 in which output of the inverter circuit is inputted to a primary side thereof, and supplies a high frequency power from a secondary side of the transformer to a load 7. The high frequency power supply apparatus also includes a phase difference detection section 11 for detecting a phase difference between an output current and an output voltage of the inverter circuit 3; and a power detection section 10 for detecting the high frequency power supplied to the load. A control for maintaining the phase of the output current of the inverter circuit with respect to the output voltage thereof in a delay phase state is performed by maintaining consistency of a DC voltage inputted to the inverter circuit 3. At the same time, a control for allowing the high frequency power supplied to the load to approach a set value or be held in a permissible range is also performed by increasing or decreasing a resistance amount of an impedance of a circuit when a load side of the inverter circuit 3 is viewed from an output terminal thereof. <P>COPYRIGHT: (C)2013,JPO&INPIT |
