| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of correcting flection of a base plate while controlling variation of the distance between a mask and the base plate. <P>SOLUTION: A first screw 133 and a second screw 134 drive a movable part 126B relative to a fixed part 126A in the direction parallel to a surface of a mask M (horizontal direction), which restrains the vertical displacement of the movable part 126B relative to the fixed part 126A, thereby restraining variation of the distance between the mask M and a base plate W to correct the bending of the mask M. This facilitates or does away with readjustment of a camera observing an alignment mark of the mask M or an aperture covering the pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT |
