| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment device capable of aligning the center position of a work with the center of a rotary shaft during rotating operation without stopping the rotating operation. <P>SOLUTION: A center alignment device for a work includes a placement table 21 on which a work W is placed; an XY stage 22 which is arranged below the placement table 21 and moves the placement table 21 in two orthogonal directions on a plane; an X-axial driving part 6 and a Y-axial driving part 7 which drive the XY stage 22; a rotary shaft which supports the XY stage rotatably from below and is aligned with the origin of the XY stage; a rotary shaft driving part 8 which drives and rotates the rotary shaft; and edge position detection means 3 for detecting an edge position of the work W. A control part 4 calculates a movement quantity of the XY stage 22 needed to align the center position of the work W with the center of the rotary shaft based upon edge position information and rotational angle information while driving and rotating the rotary shaft, and actuates one of the X-axial driving part 6 and Y-axial driving part 7 based upon the movement quantity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
