| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for making an epitaxial structure. <P>SOLUTION: A method for making an epitaxial structure includes a first step of providing a substrate having at least one crystal face, a second step of placing a carbon nanotube layer with a plurality of gaps on the crystal face of the substrate so that part of the crystal face of the substrate is exposed by the gaps of the carbon nanotube layer, a third step of growing an epitaxial layer on the crystal face of the substrate, to cover the carbon nanotube layer, and a fourth step of removing the substrate and the carbon nanotube layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
