摘要 |
<P>PROBLEM TO BE SOLVED: To provide an epitaxial structure and a method for making the same. <P>SOLUTION: A method for making an epitaxial structure includes a first step of providing a substrate having at least one epitaxial growth surface, a second step of placing a fist carbon nanotube layer with a plurality of gaps on the epitaxial growth surface of the substrate, a third step of growing a first epitaxial layer on the epitaxial growth surface of the substrate, to enclose the first carbon nanotube layer, a fourth step of placing a second carbon nanotube layer with a plurality of gaps on a surface of the first epitaxial layer, the surface being an epitaxial growth surface of the first epitaxial layer, and a fifth step of growing a second epitaxial layer on the epitaxial growth surface of the first epitaxial layer, to enclose the second carbon nanotube layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |