| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a suction device which has a simple structure and hardly deforms a subject. <P>SOLUTION: The suction device 10, which sucks up a subject 70, includes a suction plate 30 which is made of an insulating material and has suction holes 26 opened in a surface 22, a depressurizing means 50 which depressurizes the interior of the suction holes 26, and a control means 56 which controls the depressurizing means 50. The control means 56 executes a first step of actuating the depressurizing means 50 to cause it to suck the subject 70 and attach it to the surface 22 of the suction plate 30 when the surface 22 of the suction plate 30 faces the subject 70, and a second step of stopping the depressurizing means 50 following the end of the first step. Following the end of the second step, an electrostatic force generated from the suction plate 30 keeps the subject 70 attached to the surface 22 of the suction plate 30. <P>COPYRIGHT: (C)2013,JPO&INPIT |
