| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the shape of a test surface with high accuracy even when an alignment error exists in an optical system. <P>SOLUTION: A surface shape measuring device has: a floodlight optical system 6 which irradiates a test surface with light from a light source 1; an imaging optical system 6 which forms an image of the light reflected on the test surface; a sensor 11 which receives the light whose image is formed by the imaging optical system; and measurement means 12 for measuring the shape of the test surface by using output from the sensor. The measurement means calculates a curvature radius of the wave surface of the light irradiated on the calibration reference surface 8 via the floodlight optical system from the light source, reflected on the calibration reference surface, and made incident on the sensor via the imaging optical system by using the output from the sensor, calculates focal distance of the imaging optical system by using the curvature radius, calculates a conjugate position which becomes a conjugate relation with the sensor to the imaging optical system by using the focal distance, and calculates an imaging magnification of the imaging optical system from the focal distance and the conjugate position. The shape of the test surface is further measured by using the output from the sensor and the imaging magnification when the test surface is arranged at the conjugate position. <P>COPYRIGHT: (C)2013,JPO&INPIT |
