发明名称 COMPLEMENTARY TUNNELING FIELD EFFECT TRANSISTOR AND METHOD FOR FORMING THE SAME
摘要 A complementary tunneling field effect transistor and a method for forming the same are provided. The complementary tunneling field effect transistor comprises: a substrate; an insulating layer, formed on the substrate; a first semiconductor layer, formed on the insulating layer and comprising first and second doped regions; a first type TFET vertical structure formed on a first part of the first doped region and a second type TFET vertical structure formed on a first part of the second doped region, in which a second part of the first doped region is connected with a second part of the second doped region and a connecting portion between the second part of the first doped region and the second part of the second doped region is used as a drain output; and a U-shaped gate structure, formed between the first type TFET vertical structure and the second type TFET vertical structure.
申请公布号 US2012267609(A1) 申请公布日期 2012.10.25
申请号 US201113386581 申请日期 2011.11.28
申请人 LIANG RENRONG;XU JUN;WANG JING;TSINGHUA UNIVERSITY 发明人 LIANG RENRONG;XU JUN;WANG JING
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
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