| 发明名称 |
SAMPLE RECEIVING DEVICE FOR SAMPLE MATERIALS IN ULTRA-HIGH VACUUM CHAMBERS |
| 摘要 |
The disclosure relates to a sample-receiving device for sample materials in ultra-high vacuum chambers, in particular for sputter coating installations. |
| 申请公布号 |
US2012267244(A1) |
申请公布日期 |
2012.10.25 |
| 申请号 |
US201013499889 |
申请日期 |
2010.04.02 |
| 申请人 |
DEUTSCHES ELEKTRONEN-SYNCHROTRON DESY |
发明人 |
DOEHRMANN RALPH |
| 分类号 |
C23C14/50 |
主分类号 |
C23C14/50 |
| 代理机构 |
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代理人 |
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