发明名称 FLUID DEVICE UNIT STRUCTURE
摘要 A fluidic device unit structure in which a plurality of fluidic devices are integrated and which is effective in reducing a footprint is provided. With a fluidic device unit structure in which a plurality of fluidic devices that are connected by channels are integrated in a base member 10 in parallel, the base member 10, which has a plurality of mounting surfaces 11 on which pure-water opening and closing valves 5 are mounted, includes a pure-water circulation supply line 2 that passes through the base member 10 and that is connected in parallel to the pure-water opening and closing valves 5 via pure-water branch channels 4.
申请公布号 EP2025981(A4) 申请公布日期 2012.10.24
申请号 EP20070741928 申请日期 2007.04.19
申请人 SURPASS INDUSTRY CO., LTD. 发明人 IGARASHI, HIROKI
分类号 F16K27/00;F17D1/08 主分类号 F16K27/00
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