| 摘要 |
PURPOSE: An integration device of a scanning electron microscope and an energy dispersive x-ray spectroscopy is provided to reduce costs required for manufacturing a separate board. CONSTITUTION: An image generating means(110) creates a scanning electron microscope image for sample shape measurement and an image for analyzing x-rays at the same time. The image generating means is a scanning electron microscope which creates an image for sample shape measurement by detecting an electron emitted from a sample. A controller(120) generates a display control signal and a specific location storage control signal of the image. An x-ray measurement circuit(130) accumulates energy level for a specific location and offers material component information. A correction circuit revises rotation and contortion of a scanning line. [Reference numerals] (111) Scanning line creating circuit; (112) Correction circuit; (113) Image creating circuit; (120) Controller; (130) X-ray measurement circuit; (140) Input device
|
