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发明名称
摘要
申请公布号	JP5057423(B2)	申请公布日期	2012.10.24
申请号	JP20060133068	申请日期	2006.05.11
申请人		发明人
分类号	H01L29/786;H01L21/28;H01L21/288;H01L21/336;H01L51/05;H01L51/30;H01L51/40	主分类号	H01L29/786
代理机构		代理人
主权项
地址

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