发明名称 PROCESS AND APPARATUS FOR PRODUCING A SUBSTRATE
摘要 Process for producing a solar cell substrate, where metal particles are deposited on the surface of substrate. Metal particles are produced by liquid flame spraying method in such a way that the mean diameter of the particles to be between 30 nm and 150 nm and the deposition process is controlled in such a way that the average distance between particles is not more than four times the mean diameter of particles. Apparatus for carrying out such process.
申请公布号 EP2513353(A1) 申请公布日期 2012.10.24
申请号 EP20100803259 申请日期 2010.12.13
申请人 BENEQ OY 发明人 VAINIO, TOMMI;SKARP, JARMO
分类号 C23C4/12;B82Y20/00 主分类号 C23C4/12
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