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发明名称
Method for producing semiconductor substrate
摘要
申请公布号
EP2053650(B1)
申请公布日期
2012.10.24
申请号
EP20080016060
申请日期
2008.09.11
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
AKIYAMA, SHOJI;KUBOTA, YOSHIHIRO;ITO, ATSUO;KAWAI, MAKOTO;TOBISAKA, YUUJI;TANAKA, KOICHI
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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