发明名称 |
ZnO-based thin film for photovoltaic cell and method of its manufacturing on a substrate |
摘要 |
<p>A zinc oxide (ZnO) thin film and its method of manufacturing on a substrate for a photovoltaic cell, in which the high optical characteristic in a long-wavelength range available for the photovoltaic cell can be maintained, and at the same time, the amount of hazing can be increased. The method includes the step of forming a zinc oxide layer doped with a dopant on a transparent substrate, and the step of controlling the surface structure of the zinc oxide thin film layer by etching the zinc oxide thin film layer using hydrogen plasma.</p> |
申请公布号 |
EP2515340(A2) |
申请公布日期 |
2012.10.24 |
申请号 |
EP20120164363 |
申请日期 |
2012.04.17 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
YOO, YOUNG ZO;KIM, SEO HYUN;YOON, GUN SANG |
分类号 |
H01L31/0224;H01L31/0352;H01L31/18 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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