DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION,申请号EP20060786916-传众专利搜索

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发明名称	DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION
摘要
申请公布号	EP2044404(A4)	申请公布日期	2012.10.24
申请号	EP20060786916	申请日期	2006.07.11
申请人	J.A. WOOLLAM CO. INC.	发明人	JOHS, BLAINE D.;HERZINGER, CRAIG M.;GREEN, STEVEN E.;HALE, JEFFREY S.
分类号	G01N21/21	主分类号	G01N21/21
代理机构		代理人
主权项
地址

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