POLYMER FOR PHOTORESIST AND RESIN COMPOSITIONS THEREFOR

摘要

A polymeric compound for photoresist of the invention includes at least one monomer unit represented by following Formula (I): <CHEM> wherein R<1>, R<2>, R<3>, R<4> and R<5> are the same or different and are each a hydrogen atom or a methyl group; m, p and q each denote an integer of from 0 to 2; and n denotes 0 or 1, where the hydroxyl group and carbonyloxy group extending from a principle chain in the formula are independently combined with either of two carbon atoms on the far-left portion of the rings. By using the polymeric compound for photoresist as a base of a photoresist, the resulting photoresist exhibits well-rounded adhesion to substrates and resistance to etching.