发明名称 Method and system for managing light source operation
摘要 A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
申请公布号 US8295316(B2) 申请公布日期 2012.10.23
申请号 US20100730506 申请日期 2010.03.24
申请人 AKINS ROBERT P.;SANDSTROM RICHARD L.;BROWN DANIEL J. W.;GRAHAM MATTHEW R.;ZHANG KEVIN W.;NELISSEN PATRICK L.;CYMER, INC. 发明人 AKINS ROBERT P.;SANDSTROM RICHARD L.;BROWN DANIEL J. W.;GRAHAM MATTHEW R.;ZHANG KEVIN W.;NELISSEN PATRICK L.
分类号 H01S3/13 主分类号 H01S3/13
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