发明名称 |
Method and system for managing light source operation |
摘要 |
A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate. |
申请公布号 |
US8295316(B2) |
申请公布日期 |
2012.10.23 |
申请号 |
US20100730506 |
申请日期 |
2010.03.24 |
申请人 |
AKINS ROBERT P.;SANDSTROM RICHARD L.;BROWN DANIEL J. W.;GRAHAM MATTHEW R.;ZHANG KEVIN W.;NELISSEN PATRICK L.;CYMER, INC. |
发明人 |
AKINS ROBERT P.;SANDSTROM RICHARD L.;BROWN DANIEL J. W.;GRAHAM MATTHEW R.;ZHANG KEVIN W.;NELISSEN PATRICK L. |
分类号 |
H01S3/13 |
主分类号 |
H01S3/13 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|