Optical scanning element, driving method for same, and optical scanning probe employing optical scanning element

摘要

An optical scanning element is provided and includes: a substrate; a first movable section supported on the substrate so as to be capable of rocking displacement about a first axis parallel to a surface of the substrate; a second movable section arranged integrally on the first movable section and supported so as to be capable of rocking displacement about a second axis perpendicular to the first axis, the second movable section having a micro mirror on an upper surface thereof; and a driving section that applies a physical action force on the first movable section and the second movable section so as to cause the micro mirror to perform rocking displacement in two axial directions about the first axis and the second axis.