发明名称 Thermally stabilized electrode structure
摘要 Memory devices and methods for manufacturing are described herein. A memory device as described herein includes a first electrode layer, a second electrode layer, and a thermal isolation structure including a layer of thermal isolation material between the first and second electrode layers. The first and second electrode layers and the thermal isolation structure define a multi-layer stack having a sidewall. A sidewall conductor layer including a sidewall conductor material is on the sidewall of the multi-layer stack. The sidewall conductor material has an electrical conductivity greater than that of the thermal isolation material. A memory element including memory material is on and in contact with the second electrode layer.
申请公布号 US8293600(B2) 申请公布日期 2012.10.23
申请号 US201113311637 申请日期 2011.12.06
申请人 CHEN SHIH-HUNG;MACRONIX INTERNATIONAL CO., LTD. 发明人 CHEN SHIH-HUNG
分类号 H01L21/8236 主分类号 H01L21/8236
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