| 摘要 |
The present invention provides a particle counter capable of accurately discriminating the signal of scattered light by real particles from the background light noise, and furthermore, capable of detecting smaller particles than conventional particle counters. The particle counter according to the present invention includes: a light irradiator for emitting light to the measurement area 40 in a vacuum state or in a near vacuum state; a scattered light detector 32 for detecting scattered light generated when the light is delivered to the measurement area 40; a discriminator 18 for determining whether or not a particle exists in the measurement area 40 by comparing the detection signal of the scattered light detector 32 and a predetermined discrimination threshold; a vacuum gauge 12 for measuring the pressure of the measurement area 40; and the threshold setting unit 16 for setting a discrimination threshold in accordance with the pressure of the measurement area 40. |
