发明名称 EMS tunable transistor
摘要 A field effect transistor comprises an electrostatically moveable gate electrode. The moveable gate is supported by at least two posts, and the source, drain, and channel of the transistor are centrally located under the moveable layer. At least one electrode is positioned on at least two sides of the source, drain, and channel.
申请公布号 US8294184(B2) 申请公布日期 2012.10.23
申请号 US201113033423 申请日期 2011.02.23
申请人 KOTHARI MANISH;GOVIL ALOK;QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 KOTHARI MANISH;GOVIL ALOK
分类号 H01L29/772 主分类号 H01L29/772
代理机构 代理人
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