| 摘要 |
A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased. |
