发明名称 |
In-situ plasma/laser hybrid scheme |
摘要 |
A method and apparatus for forming layers on a target. The apparatus and method employ a direct current plasma apparatus to form at least one layer using a plasma jet containing precursors. In some embodiments, the direct current plasma apparatus utilizes axial injection of the precursors through the cathode (in an upstream and/or downstream configuration) and/or downstream of the anode. In some embodiments, the direct current plasma apparatus can comprise a laser source for remelting the layer using a laser beam to achieve in-situ densification thereof. |
申请公布号 |
US8294060(B2) |
申请公布日期 |
2012.10.23 |
申请号 |
US20100772342 |
申请日期 |
2010.05.03 |
申请人 |
MOHANTY PRAVANSU S.;MOROZ NICHOLAS ANTON;THE REGENTS OF THE UNIVERSITY OF MICHIGAN |
发明人 |
MOHANTY PRAVANSU S.;MOROZ NICHOLAS ANTON |
分类号 |
B23K9/00 |
主分类号 |
B23K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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