发明名称 Semiconductor chip with protective scribe structure
摘要 Apparatus and methods pertaining to die scribe structures are disclosed. In one aspect, a method of manufacturing is provided that includes fabricating an active region of a semiconductor die so that the active region has at least one corner. A scribe structure is fabricated around the active region so that the scribe structure includes at least one fillet.
申请公布号 US8293581(B2) 申请公布日期 2012.10.23
申请号 US20090388064 申请日期 2009.02.18
申请人 SU MICHAEL Z.;FU LEI;GLOBALFOUNDRIES INC. 发明人 SU MICHAEL Z.;FU LEI
分类号 H01L21/00;H01L23/544 主分类号 H01L21/00
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