发明名称 Scanning probe microscope with current controlled actuator
摘要 The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.
申请公布号 US8296857(B2) 申请公布日期 2012.10.23
申请号 US200813132012 申请日期 2008.12.17
申请人 RYCHEN JOERG;SPECS ZUERICH GMBH 发明人 RYCHEN JOERG
分类号 G01Q10/00;G01Q10/06 主分类号 G01Q10/00
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