| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic irradiation device in which the cMUT capable of obtaining high sound pressure is used as a sound source. <P>SOLUTION: An ultrasonic irradiation device includes the cMUT 110 and drive control means 120. The drive control means 120 allows the cMUT 110 to emit an ultrasonic wave by applying a voltage between the lower electrode 114 and the upper electrode 117 and vibrating a vibration film 119. At that time, the drive control means 120 vibrates the vibration film 119 in a high order mode. At that time, the vibration film 119 is vibrated while keeping a wide area around the center thereof in a flat shape. As a result, directivity of the ultrasonic wave to be generated is enhanced and high sound pressure is obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
