| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive agent that can increase a polishing speed and reduce scratches (linear impressions) when an object to be polished is polished using the agent. <P>SOLUTION: This abrasive agent is manufactured by dispersing, in dispersion media, inorganic oxide fine particles having a solid acid amount or a solid base amount of 0.01 mmol/g or higher and an averaged grain size of 2 μm or smaller. The pH of the abrasive agent is 8.0-11.5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
