| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning device in which warpage of a metal substrate provided with a mirror is reduced, and a method for manufacturing the same. <P>SOLUTION: A thin film having a thickness corresponding to an amount of warpage of a metal substrate which is measured at a room temperature in accordance with a magnitude relation between a thermal expansion coefficient of a material constituting the metal substrate and that of a material of the thin film to be formed on the metal substrate is formed on a concave or convex surface of the metal substrate at a first temperature lower than a melting point of the material constituting the metal substrate, and the temperature of the metal substrate having the thin film formed thereon is reduced to the room temperature. <P>COPYRIGHT: (C)2013,JPO&INPIT |
