| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus of cleaning an optical component, capable of preventing uneven cleaning of an optical component from occurring in an ultrasonic cleaning process. <P>SOLUTION: The cleaning apparatus 1 is constructed to include a cleaning tank 2 wherein a cleaning liquid 3 for cleaning an object W to be cleaned is stored, a horn 4b that transmits ultrasonic vibration generated by an ultrasonic oscillator 4a and an ultrasonic oscillator 4a and emits ultrasonic vibration from the horn front face 4c, and a cavitation generator 4 disposed in front of the horn front face 4c immersed in the cleaning liquid 3 to generate cavitation resulting from the ultrasonic vibration, so that the cleaning is carried out by exposing the object W to be cleaned to the cavitation generated by the cavitation generator 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
