APPARATUS FOR CLEANING AN OBJECT

摘要

PURPOSE: A cleaning device is provided to efficiently eliminate foreign materials by rotating a rotary unit around a semiconductor package by 180°. CONSTITUTION: A cleaning chamber(110) loads a cleaning object. An injection unit lets foreign materials on the cleaning object floated. The cleaning object is carried within the cleaning chamber. A rotary unit(130) rotates the cleaning object. A dust collection unit(140) sucks the foreign materials.