| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized positioning device for positioning a load in a horizontal X direction and a vertical Z direction. <P>SOLUTION: The positioning device comprises a linear motor for performing drive in the horizontal X direction and an actuator for performing drive in the vertical Z direction, the actuator is loaded on the movable side of the linear motor and the load is positioned in the X and Z directions. In the positioning device, when the X direction dimension of the linear motor is defined as L and the Z direction dimension is defined as W, W/L≥2 is satisfied. <P>COPYRIGHT: (C)2013,JPO&INPIT |
