| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an evaluation method for distribution state in which a distribution state of a specific point in a sample is quantitatively evaluated objectively always on a constant scale not at a part of the sample, but over a wide range. <P>SOLUTION: The evaluation method for distribution state is for evaluating the distribution state of the specific point in the sample, the evaluation method including: deriving a gradient of a linear approximate straight line and a determination coefficient obtained as x=logn and y=logS<SB POS="POST">n</SB>when the numeral sum of data C, obtained by observing a plurality of regions of the sample along a constant direction and showing observation results in the respective observation regions, in the respective observation regions of observation numbers 1 to n is denoted as S<SB POS="POST">n</SB>based upon data C; and quantitatively evaluating the distribution state of the specific point in the sample based upon the gradient and determination coefficient. <P>COPYRIGHT: (C)2013,JPO&INPIT |
