| 摘要 |
<P>PROBLEM TO BE SOLVED: To clean an electronic material effectively in a short time by using a persulfuric acid contained sulphuric acid solution which is accompanied with waste fluid. <P>SOLUTION: An electronic material cleaning device 1 includes an electrolysis part 11 which electrolyzes sulphuric acid solution of 70 mass% or more, a transmission line which feeds a persulfuric acid contained sulphuric acid solution obtained by electrolyzing of the electrolysis part 11, a cleaning bath 21 which houses the persulfuric acid contained sulphuric acid solution that is fed by the transmission line, an ozone generating part (ozone generator 28) for generating ozone, and an ozone supply part (ozone supply pipe 26 and bubbling nozzle 27) which supplies the ozone generated by the ozone generating part to the persulfuric acid contained sulphuric acid solution in the cleaning bath 21. Using the electronic material cleaning device, an electronic material 100 is soaked in the cleaning bath which houses the persulfuric acid contained sulphuric acid solution obtained by electrolyzing, for cleaning. The ozone gas is supplied to the persulfuric acid contained sulphuric acid solution in the cleaning bath 21 during cleaning, to promote decomposition of the ozone, resulting in excellent oxidizing power. <P>COPYRIGHT: (C)2013,JPO&INPIT |
