| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor which is capable of suppressing reduction in detection precision. <P>SOLUTION: A junction 300 is made into polygonal shape from which corner portions are removed, with rectangular outer shape contour lines constituting an outer shape of a frame. Thus, with respect to a conventional dynamic quantity sensor in which a junction is made into rectangular frame shape, a length of one side becomes shorter in the portion from which the corner is removed, thereby reducing an expansion quantity/shrinkage quantity. Thus, a stress to be generated in a corner portion newly formed by removing the corner portion can be reduced and a stress to be applied from the corner portion to a sensor substrate 100 can be reduced. Therefore, detection precision can be suppressed from being reduced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
