| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten a detection time while maintaining a position detection accuracy of a plurality of reference marks formed on an object. <P>SOLUTION: An evaluation value is acquired by taking each of reference marks to be measured as an objective mark. Based on the evaluation values, a probability that interpolation position information of the reference mark agrees with actually measured position information is evaluated. In the case where "optimum evaluation value≤threshold value" is satisfied, in other words, the position information of one reference mark can be interpolated with high probability based on the position information of the other reference mark, one reference mark is excluded from the reference mark to be actually measured. Consequently, for the second substrate or later, the number of reference marks to be actually measured can be decreased while maintaining a high detection precision, resulting in improved throughput. <P>COPYRIGHT: (C)2013,JPO&INPIT |
