PROBE CARD DETECTION DEVICE, POSITIONING DEVICE FOR WAFER, AND POSITIONING METHOD FOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide a probe card detection device capable of positioning a probe card to a semiconductor wafer without detecting a needle tip of a probe of the probe card in an inspection chamber, of eliminating a need for using a dummy wafer, and of positioning the probe to the semiconductor wafer quickly.

SOLUTION: A probe card detection device 30 has: a probe detection chamber 31 having a supporting body 31A for positioning and detachably mounting a probe card 19 or a probe correction card 33 to a predetermined position; and first and second cameras 32A and 32B provided movably in the probe detection chamber 31 and detecting a needle tip of the probe 19A or a target 33A. A difference between a horizontal position of needle tips of the two probes 19A and a horizontal position of the two targets 33A that is detected by the first and second cameras 32A and 32B, is detected as a correction value δ used for alignment of the probe 19A and an electrode pad of a semiconductor wafer.

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