发明名称 HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which precisely and uniformly adjusts magnetic characteristics of a large amount of an amorphous magnetic material for example. <P>SOLUTION: A heat treatment furnace is a furnace of a double structure having an outer shell furnace body 12 and an inner shell furnace 13 housed in the outer shell furnace body 12. An inner space 18A of the outer shell furnace body 12 is heated by an outer electric heater 14, and electric heaters 14A, 14B are disposed near openings 13A, 13B located on both sides of the inner shell furnace 13. Further, a blower 15, forcibly convecting an atmosphere gas flowing in an inner space 18B of the inner shell furnace 13, is disposed. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012204538(A) 申请公布日期 2012.10.22
申请号 JP20110066635 申请日期 2011.03.24
申请人 TAMA TLO LTD;OHTAMA CO LTD 发明人 SAKAKIBARA MITSURU;MATSUYAMA SHINYA
分类号 H01L21/324 主分类号 H01L21/324
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