| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method of a surface modified R-Fe-B based sintered magnet having excellent corrosion resistance and excellent magnetic characteristics. <P>SOLUTION: An atmosphere where the oxygen partial pressure is 1×10<SP POS="POST">3</SP>to 1×10<SP POS="POST">5</SP>Pa, the partial water vapor pressure is lower than 1000 Pa, and the ratio of the oxygen partial pressure and the partial water vapor pressure (oxygen partial pressure/partial water vapor pressure)is 1 to 20000 (where, excepting 1) is formed so that a positive pressure state is brought in the processing chamber by performing introduction of the atmospheric gas per 1 m<SP POS="POST">3</SP>of the volume in the processing chamber on conditions of 0.028 m<SP POS="POST">3</SP>/min or more as the oxygen flow rate, and 3 m<SP POS="POST">3</SP>/min or less as the total flow rate. Subsequently, an R-Fe-B based sintered magnet having an oxygen content of 0.1 mass% or less is heat treated at 230 to 260°C. <P>COPYRIGHT: (C)2013,JPO&INPIT |
