| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stable laser light. <P>SOLUTION: The laser system may comprise: a master oscillator which outputs pulse laser light; an amplifying device which amplifies the pulse laser light outputted from the master oscillator; a first timing detector which detects timing of the pulse laser light outputted from the master oscillator; a second timing detector which detects discharge timing of the amplifying device; and a controller which controls at least one of the timing at which the master oscillator outputs the pulse laser light and the timing at which the amplifying device discharges so that the amplifying device can discharge when the pulse laser light passes through a discharge space of the amplifying device, based on detection results obtained by the first timing detector and the second timing detector. <P>COPYRIGHT: (C)2013,JPO&INPIT |
