MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, LIQUID INJECTION HEAD, AND LIQUID INJECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element which does not contain lead and is free from a problem such as film peeling and deterioration of piezoelectric characteristics, and to provide a liquid injection head and a liquid injection device.

SOLUTION: A manufacturing method of a piezoelectric element comprises: a step of forming an adhesion layer 56 composed of zirconium on an insulator film 55 composed of zirconium oxide; a step of forming a first electrode 60 on the adhesion layer 56; a step of forming a piezoelectric layer 70 composed of complex oxide containing bismuth on the first electrode 60; and a step of forming a second electrode 80 on the piezoelectric layer 70.

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