发明名称 OBSERVATION DEVICE AND OBSERVATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an observation device which is suitable for measurement of an observation object held in a container including a reflection surface. <P>SOLUTION: The observation device includes: branch means 9 of branching incident light into reference light and measurement light; an observation optical system 11 which irradiates the observation object with the measurement light in a first polarization state, and receives the measurement light having passed through the observation object; composition means 9 of putting together the reference light and the measurement light having passed through the observation object; dimming means 14 of dimming light in a second polarization state, having predetermined correspondence relation with the first polarization state, of the measurement light having passed through the observation object; detection means 18 of detecting the reference light and the measurement light put together by the composition means; and polarization control means 2 and 13 of controlling a polarization state of at least one of the reference light and the measurement light so that the reference light is in a polarization state of interference with light in a third polarization state different from the second polarization state of the measurement light having passed through the observation object. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012202774(A) 申请公布日期 2012.10.22
申请号 JP20110066646 申请日期 2011.03.24
申请人 NIKON CORP 发明人 NISHIMURA KUMIKO
分类号 G01N21/17;G01N21/21 主分类号 G01N21/17
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